ASM
Senior Engineer I, System Engineering (Systems and Mechanical Engineering – Electrostatic Chuck (ESC))
US > Arizona > Phoenix · Senior
Sponsorship not specifiedDetected 6 days ago
ANSYSFEAThermal AnalysisMechanical DesignHardware DesignControlsCOMSOL5G/LTECommunicationProblem Solving
About the role
- Step into a career with ASM, where cutting edge technology meets collaborative culture. For over 55 years ASM has been ahead of what's next, at the forefront of innovation and what's technologically possible.
- With more than 4,500 ASMers representing 70 nationalities, our people and our advanced semiconductor devices are playing a crucial role in trends such as 5G, cloud computing, AI, and autonomous driving.
- But we're more than just a tech company.
Responsibilities
- Design and develop Johnsen-Rahbek (JR) and Coulombic-type ESC assemblies for 300mm wafer processing applications.
- Support ESC integration with RF bias and DC chucking power supplies in plasma processing chambers.
- Design multi-zone embedded heater assemblies for uniform wafer temperature distribution across process temperatures (room temperature to 700°C+).
- Perform thermal modeling and simulation (FEA) to optimize heater layout, power density, and zone configuration.
- Develop and validate closed-loop temperature control systems including thermocouple/RTD sensor selection and PID control tuning.
- Manage thermal stress and CTE mismatch between heater, ceramic, and base plate materials to ensure long-term reliability.
Requirements
- Master's degree or PhD in Materials Science, Ceramic Engineering, or related discipline.
- 3-5 years of experience in semiconductor capital equipment engineering, with direct exposure to ESC or heater technologies.
- Experience with 300mm wafer processing tools and OEM component qualification processes.
- Knowledge of high-purity ceramic fabrication techniques (sintering, plasma spray, anodization).
- Familiarity with reactive process chemistries (fluorine, chlorine plasmas) and their impact on ESC/heater materials.
- Experience with ceramic materials and thin-film dielectric systems used in semiconductor equipment.
- Familiarity with thermal management in vacuum environments, including radiation, conduction, and convection heat transfer.
- Hands-on experience with electrical characterization equipment (LCR meters, high-voltage testers, curve tracers).
- Knowledge of plasma processing systems (etch, CVD, PVD, or ALD) and their requirements for ESC performance.
- Experience with FEA thermal simulation tools (ANSYS, COMSOL, or equivalent).
This listing is sourced directly from ASM's careers page and normalized into a canonical job model.